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超高真空档板阀基本参数与连接尺寸_阀门标准
|
公称通径 DN |
漏率 Pa·L/s |
烘烤温度 ℃ |
连接尺寸A mm |
连接法兰 标准 |
|
| 阀板密封材料为无氧铜 | 阀板密封材料为氟橡胶 | ||||
| 16 | ≤1.3×10-7 | ≤400 | ≤150 | 50 | GB/T 6070 |
| 25 | 80 | ||||
| 32 | 100 | ||||
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